Ion implantation into semiconductors, oxides and ceramics: proceedings of the E-MRS 1998 Spring Meeting Symposium J on Ion Implantation into Semiconductors, Oxides and Ceramics, Strasbourg, France, 16-19 June 1998
| Frontdoor URL | https://opus.bibliothek.uni-augsburg.de/opus4/25121 |
|---|---|
| Publisher: | North-Holland |
| Place of publication: | Amsterdam |
| Editor: | Jörg K. N. Lindner |
| Type: | Conference Proceeding |
| Language: | English |
| Year of first Publication: | 1999 |
| Release Date: | 2017/07/21 |
| Pagenumber: | XIV, 442 |
| Series: | Beam Interactions with Materials and Atoms ; 147 |
| Institutes: | Mathematisch-Naturwissenschaftlich-Technische Fakultät |
| Mathematisch-Naturwissenschaftlich-Technische Fakultät / Institut für Physik |
