@article{SchellenbergerRoederMattesetal.2018,
  author    = {M. Schellenberger and Georg Roeder and Andreas Mattes and Markus Pfeffer and Lothar Pfitzner and Alexander Knapp and H. M{\"u}hlberger and Josef Bichlmeier and Christian Valeanu and Andreas Kyek and Benjamin Lenz and Markus Frisch and G{\"u}nther Leditzky},
  title     = {Developing a framework for virtual metrology and predictive maintenance},
  journal   = {Future Fab International},
  number    = {39},
  pages     = {32 -- 37},
  year      = {2018},
}