Amorphization of GaN by ion implantation
| Author: | C. Liu, Axel WenzelGND, Bernd RauschenbachORCiD, E. Alves, A. D. Sequeira, N. Franco, M. F. da Silva, J. C. Soares, X. J. Fan |
|---|---|
| Frontdoor URL | https://opus.bibliothek.uni-augsburg.de/opus4/123788 |
| ISSN: | 0168-583XOPAC |
| Parent Title (English): | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms |
| Publisher: | Elsevier BV |
| Place of publication: | Amsterdam |
| Type: | Article |
| Language: | English |
| Year of first Publication: | 2001 |
| Release Date: | 2025/07/24 |
| Volume: | 178 |
| Issue: | 1-4 |
| First Page: | 200 |
| Last Page: | 203 |
| DOI: | https://doi.org/10.1016/s0168-583x(00)00456-0 |
| Institutes: | Mathematisch-Naturwissenschaftlich-Technische Fakultät |
| Mathematisch-Naturwissenschaftlich-Technische Fakultät / Institut für Physik |
