Influence of plasma density and plasma sheath dynamics on the ion implantation by plasma immersion technique

  • Influence of plasma density and plasma sheath dynamics on the ion implantation by plasma immersion technique / B. Rauschenbach ... - In: Nuclear instruments and methods in physics research. B. 113. 1996. S. 266-269

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Metadaten
Author:Bernd RauschenbachORCiD
Frontdoor URLhttps://opus.bibliothek.uni-augsburg.de/opus4/23616
Type:Article
Language:English
Year of first Publication:1996
Release Date:2017/07/21
Institutes:Mathematisch-Naturwissenschaftlich-Technische Fakult├Ąt
University Bibliography legacy data (bibliographical metadata without fulltext):University Bibliography legacy data (bibliographical metadata without fulltext)