Influence of plasma density and plasma sheath dynamics on the ion implantation by plasma immersion technique

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Author:H. Bender, J. Brutscher, Wolfgang EnsingerORCiDGND, R. Günzel, J. Halder, H. Klein, Bernd RauschenbachORCiD, J. Schäfer, B. Seiler, R. Thomae
Frontdoor URLhttps://opus.bibliothek.uni-augsburg.de/opus4/23617
ISSN:0168-583XOPAC
Parent Title (English):Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Publisher:North-Holland
Place of publication:Amsterdam
Type:Article
Language:English
Year of first Publication:1996
Release Date:2017/07/21
Volume:113
Issue:1-4
First Page:266
Last Page:269
DOI:https://doi.org/10.1016/0168-583X(95)01414-4
Institutes:Mathematisch-Naturwissenschaftlich-Technische Fakultät
Mathematisch-Naturwissenschaftlich-Technische Fakultät / Institut für Physik