Influence of plasma density and plasma sheath dynamics on the ion implantation by plasma immersion technique
Author: | H. Bender, J. Brutscher, Wolfgang EnsingerORCiDGND, R. Günzel, J. Halder, H. Klein, Bernd RauschenbachORCiD, J. Schäfer, B. Seiler, R. Thomae |
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Frontdoor URL | https://opus.bibliothek.uni-augsburg.de/opus4/23617 |
ISSN: | 0168-583XOPAC |
Parent Title (English): | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms |
Publisher: | North-Holland |
Place of publication: | Amsterdam |
Type: | Article |
Language: | English |
Year of first Publication: | 1996 |
Release Date: | 2017/07/21 |
Volume: | 113 |
Issue: | 1-4 |
First Page: | 266 |
Last Page: | 269 |
DOI: | https://doi.org/10.1016/0168-583X(95)01414-4 |
Institutes: | Mathematisch-Naturwissenschaftlich-Technische Fakultät |
Mathematisch-Naturwissenschaftlich-Technische Fakultät / Institut für Physik |