In situ stress analysis of boron nitride films prepared by ion beam assisted deposition
| Author: | Michael Zeitler, S. Sienz, H. Neumann, M. Zeuner, Jürgen W. GerlachGND, Bernd RauschenbachORCiD |
|---|---|
| Frontdoor URL | https://opus.bibliothek.uni-augsburg.de/opus4/25916 |
| ISSN: | 0168-583xOPAC |
| Parent Title (English): | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms |
| Publisher: | Elsevier |
| Place of publication: | Amsterdam |
| Type: | Article |
| Language: | English |
| Year of first Publication: | 1998 |
| Publishing Institution: | Universität Augsburg |
| Release Date: | 2017/07/21 |
| Volume: | 139 |
| Issue: | 1-4 |
| First Page: | 327 |
| Last Page: | 331 |
| DOI: | https://doi.org/10.1016/S0168-583X(98)00045-7 |
| Institutes: | Mathematisch-Naturwissenschaftlich-Technische Fakultät |
| Mathematisch-Naturwissenschaftlich-Technische Fakultät / Institut für Physik |
