Optical diagnostics of molecular carbon densities in methane plasmas and their correlation with higher hydrocarbons
| Author: | Ursel FantzORCiDGND, Stefan MeirORCiDGND, Markus Berger |
|---|---|
| Frontdoor URL | https://opus.bibliothek.uni-augsburg.de/opus4/30305 |
| Parent Title (English): | Conference proceedings : ESCAMPIG 16, Sixteenth European Conference on Atomic & Molecular Physics of Ionized Gases [and] ICRP 5, Fifth International Conference on Reactive Plasmas [as international version of the Symposium on Plasma Processing (SPP)] ; joint conference ; Grenoble, France ; 14 - 18 July 2002 ; Vol. 2: Wednesday 17th, and Thursday 18th |
| Publisher: | Centre National de la Recherche Scientifique; Université Joseph Fourier |
| Place of publication: | Grenoble |
| Editor: | Nader Sadeghi, Hideo Sugai |
| Type: | Part of a Book |
| Language: | English |
| Year of first Publication: | 2002 |
| Release Date: | 2017/07/21 |
| First Page: | 123 |
| Last Page: | 124 |
| Institutes: | Mathematisch-Naturwissenschaftlich-Technische Fakultät |
| Mathematisch-Naturwissenschaftlich-Technische Fakultät / Institut für Physik | |
| Mathematisch-Naturwissenschaftlich-Technische Fakultät / Institut für Physik / AG Experimentelle Plasmaphysik (EPP) |
