Optical diagnostics of molecular carbon densities in methane plasmas and their correlation with higher hydrocarbons

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Author:Ursel FantzORCiDGND, Stefan MeirORCiDGND, Markus Berger
Frontdoor URLhttps://opus.bibliothek.uni-augsburg.de/opus4/30305
Parent Title (English):Conference proceedings : ESCAMPIG 16, Sixteenth European Conference on Atomic & Molecular Physics of Ionized Gases [and] ICRP 5, Fifth International Conference on Reactive Plasmas [as international version of the Symposium on Plasma Processing (SPP)] ; joint conference ; Grenoble, France ; 14 - 18 July 2002 ; Vol. 2: Wednesday 17th, and Thursday 18th
Publisher:Centre National de la Recherche Scientifique; Université Joseph Fourier
Place of publication:Grenoble
Editor:Nader Sadeghi, Hideo Sugai
Type:Part of a Book
Year of first Publication:2002
Release Date:2017/07/21
First Page:123
Last Page:124
Institutes:Mathematisch-Naturwissenschaftlich-Technische Fakultät
Mathematisch-Naturwissenschaftlich-Technische Fakultät / Institut für Physik
Mathematisch-Naturwissenschaftlich-Technische Fakultät / Institut für Physik / AG Experimentelle Plasmaphysik (EPP)