Automated implanter endstation for combinatorial materials science with ion beams

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Metadaten
Author:Ingo GroßhansGND, Helmut KarlGND, Bernd StritzkerGND
Frontdoor URLhttps://opus.bibliothek.uni-augsburg.de/opus4/31835
ISBN:9780735401495OPAC
Parent Title (German):Application of accelerators in research and industry: 17th International Conference on the Application of Accelerators in Research and Industry, Denton, Texas, 12-16 November 2002
Publisher:American Institute of Physics
Place of publication:Melville, NY
Editor:Jerome L. Duggan, I. L. Morgan
Type:Part of a Book
Language:English
Year of first Publication:2003
Release Date:2017/07/21
First Page:690
Last Page:693
Series:AIP Conference Proceedings ; 680
Institutes:Mathematisch-Naturwissenschaftlich-Technische Fakultät
Mathematisch-Naturwissenschaftlich-Technische Fakultät / Institut für Physik
Mathematisch-Naturwissenschaftlich-Technische Fakultät / Institut für Physik / Lehrstuhl für Experimentalphysik IV