Influence of the excitation frequency on the RF power transfer efficiency of low pressure hydrogen ICPs

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Metadaten
Author:David Rauner, Stefan BriefiORCiD, Ursel FantzORCiDGND
Frontdoor URLhttps://opus.bibliothek.uni-augsburg.de/opus4/63877
URL:http://iopscience.iop.org/article/10.1088/1361-6595/ab3d6a/pdf
ISSN:1361-6595OPAC
Parent Title (English):Plasma Sources Science and Technology
Publisher:IOP Publishing
Place of publication:Bristol
Type:Article
Language:English
Year of first Publication:2019
Release Date:2019/10/22
Tag:Condensed Matter Physics
Volume:28
Issue:9
First Page:095011
DOI:https://doi.org/10.1088/1361-6595/ab3d6a
Institutes:Mathematisch-Naturwissenschaftlich-Technische Fakultät
Mathematisch-Naturwissenschaftlich-Technische Fakultät / Institut für Physik
Mathematisch-Naturwissenschaftlich-Technische Fakultät / Institut für Physik / AG Experimentelle Plasmaphysik (EPP)