Growth and defects of diamond facets under negative biasing conditions in a microwave plasma CVD process

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Metadaten
Author:K.-H. Thürer, Matthias SchreckORCiDGND, Bernd StritzkerGND, N. Fuchs, P. Pongratz
Frontdoor URLhttps://opus.bibliothek.uni-augsburg.de/opus4/66414
ISSN:0925-9635OPAC
Parent Title (English):Diamond and Related Materials
Publisher:Elsevier
Place of publication:Amsterdam [u.a.]
Type:Article
Language:English
Year of first Publication:1997
Release Date:2019/12/09
Tag:Mechanical Engineering; Electrical and Electronic Engineering; Materials Chemistry; General Physics and Astronomy; Electronic, Optical and Magnetic Materials; General Chemistry
Volume:6
Issue:8
First Page:1010
Last Page:1014
DOI:https://doi.org/10.1016/s0925-9635(96)00745-5
Institutes:Mathematisch-Naturwissenschaftlich-Technische Fakultät
Mathematisch-Naturwissenschaftlich-Technische Fakultät / Institut für Physik
Mathematisch-Naturwissenschaftlich-Technische Fakultät / Institut für Physik / Lehrstuhl für Experimentalphysik IV