Application of a Langmuir probe AC technique for reliable access to the low energy range of electron energy distribution functions in low pressure plasmas

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Metadaten
Author:A. Heiler, Roland Friedl, Ursel FantzORCiDGND
Frontdoor URLhttps://opus.bibliothek.uni-augsburg.de/opus4/76532
ISSN:0021-8979OPAC
ISSN:1089-7550OPAC
Parent Title (English):Journal of Applied Physics
Publisher:AIP Publishing
Type:Article
Language:English
Year of first Publication:2020
Release Date:2020/05/31
Tag:General Physics and Astronomy
Volume:127
Issue:11
First Page:113302
DOI:https://doi.org/10.1063/1.5139601
Institutes:Mathematisch-Naturwissenschaftlich-Technische Fakultät
Mathematisch-Naturwissenschaftlich-Technische Fakultät / Institut für Physik
Mathematisch-Naturwissenschaftlich-Technische Fakultät / Institut für Physik / AG Experimentelle Plasmaphysik (EPP)