Recovery of the Si–SiO2 interface studied by self-diffusion after high fluence ion implantation of 28Si

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Metadaten
Author:Helmut KarlORCiDGND, Ch. Delpero, P. Huber, Bernd StritzkerGND
Frontdoor URLhttps://opus.bibliothek.uni-augsburg.de/opus4/78610
ISSN:0168-583XOPAC
Parent Title (English):Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Publisher:Elsevier
Place of publication:Amsterdam [u.a.]
Type:Article
Language:English
Year of first Publication:2006
Release Date:2020/08/04
Tag:Nuclear and High Energy Physics; Instrumentation
Volume:242
Issue:1-2
First Page:683
Last Page:685
DOI:https://doi.org/10.1016/j.nimb.2005.08.088
Institutes:Mathematisch-Naturwissenschaftlich-Technische Fakultät
Mathematisch-Naturwissenschaftlich-Technische Fakultät / Institut für Physik
Mathematisch-Naturwissenschaftlich-Technische Fakultät / Institut für Physik / Lehrstuhl für Experimentalphysik IV