Influence of defects in low-energy nitrogen ion beam assisted gallium nitride thin film deposition
| Author: | Jürgen W. GerlachGND, Stefan Sienz, Wilfried AttenbergerGND, Bernd RauschenbachORCiD |
|---|---|
| Frontdoor URL | https://opus.bibliothek.uni-augsburg.de/opus4/123109 |
| ISSN: | 0921-4526OPAC |
| Parent Title (English): | Physica B: Condensed Matter |
| Publisher: | Elsevier BV |
| Place of publication: | Amsterdam |
| Type: | Article |
| Language: | English |
| Year of first Publication: | 2001 |
| Publishing Institution: | Universität Augsburg |
| Release Date: | 2025/07/17 |
| Volume: | 308-310 |
| First Page: | 81 |
| Last Page: | 84 |
| DOI: | https://doi.org/10.1016/s0921-4526(01)00661-5 |
| Institutes: | Mathematisch-Naturwissenschaftlich-Technische Fakultät |
| Mathematisch-Naturwissenschaftlich-Technische Fakultät / Institut für Physik |
