The influence of the ion flux density on the properties of molybdenum films deposited from the vapour phase under simultaneous argon ion irradiation
| Author: | Wolfgang EnsingerORCiDGND |
|---|---|
| Frontdoor URL | https://opus.bibliothek.uni-augsburg.de/opus4/122704 |
| ISSN: | 0040-6090OPAC |
| Parent Title (English): | Thin Solid Films |
| Publisher: | Elsevier BV |
| Place of publication: | Amsterdam |
| Type: | Article |
| Language: | English |
| Year of first Publication: | 1996 |
| Publishing Institution: | Universität Augsburg |
| Release Date: | 2025/07/10 |
| Volume: | 275 |
| Issue: | 1-2 |
| First Page: | 54 |
| Last Page: | 57 |
| DOI: | https://doi.org/10.1016/0040-6090(95)07018-4 |
| Institutes: | Mathematisch-Naturwissenschaftlich-Technische Fakultät |
| Mathematisch-Naturwissenschaftlich-Technische Fakultät / Institut für Physik |
