Automated implanter endstation for combinatorial materials science with ion beams
| Author: | Ingo GroßhansGND, Helmut KarlORCiDGND, Bernd StritzkerGND |
|---|---|
| Frontdoor URL | https://opus.bibliothek.uni-augsburg.de/opus4/31835 |
| ISBN: | 9780735401495OPAC |
| Parent Title (German): | Application of accelerators in research and industry: 17th International Conference on the Application of Accelerators in Research and Industry, Denton, Texas, 12-16 November 2002 |
| Publisher: | American Institute of Physics |
| Place of publication: | Melville, NY |
| Editor: | Jerome L. Duggan, I. L. Morgan |
| Type: | Part of a Book |
| Language: | English |
| Year of first Publication: | 2003 |
| Publishing Institution: | Universität Augsburg |
| Release Date: | 2017/07/21 |
| First Page: | 690 |
| Last Page: | 693 |
| Series: | AIP Conference Proceedings ; 680 |
| Institutes: | Mathematisch-Naturwissenschaftlich-Technische Fakultät |
| Mathematisch-Naturwissenschaftlich-Technische Fakultät / Institut für Physik | |
| Mathematisch-Naturwissenschaftlich-Technische Fakultät / Institut für Physik / Lehrstuhl für Experimentalphysik IV |
