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Synthesis of buried silicon oxide layers by water plasma immersion implantation

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Metadaten
Author:Ingo GroßhansGND, Kerstin VolzGND, Wolfgang EnsingerORCiDGND, Bernd RauschenbachORCiD
Frontdoor URLhttps://opus.bibliothek.uni-augsburg.de/opus4/123168
ISSN:0168-583XOPAC
Parent Title (English):Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Publisher:Elsevier BV
Place of publication:Amsterdam
Type:Article
Language:English
Year of first Publication:1999
Publishing Institution:Universität Augsburg
Release Date:2025/07/17
Volume:155
Issue:1-2
First Page:67
Last Page:74
DOI:https://doi.org/10.1016/s0168-583x(99)00398-5
Institutes:Mathematisch-Naturwissenschaftlich-Technische Fakultät
Mathematisch-Naturwissenschaftlich-Technische Fakultät / Institut für Physik

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