Formation of buried oxide layers in titanium by high-fluence oxygen ion implantation
| Author: | Claus HammerlGND, Y. Bohne, W. Assmann, K. Helming, Bernd RauschenbachORCiD |
|---|---|
| Frontdoor URL | https://opus.bibliothek.uni-augsburg.de/opus4/123230 |
| ISSN: | 0168-583XOPAC |
| Parent Title (English): | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms |
| Publisher: | Elsevier BV |
| Place of publication: | Amsterdam |
| Type: | Article |
| Language: | English |
| Year of first Publication: | 2003 |
| Publishing Institution: | Universität Augsburg |
| Release Date: | 2025/07/17 |
| Volume: | 206 |
| First Page: | 1072 |
| Last Page: | 1076 |
| DOI: | https://doi.org/10.1016/s0168-583x(03)00913-3 |
| Institutes: | Mathematisch-Naturwissenschaftlich-Technische Fakultät |
| Mathematisch-Naturwissenschaftlich-Technische Fakultät / Institut für Physik |
