Temperature dependence of in-plane stresses in sublayers of Al/AlN/Al2O3(0001) structure
| Author: | J. Keckes, S. Six, J. W. Gerlach, Bernd RauschenbachORCiD |
|---|---|
| Frontdoor URL | https://opus.bibliothek.uni-augsburg.de/opus4/123528 |
| ISSN: | 0022-0248OPAC |
| Parent Title (English): | Journal of Crystal Growth |
| Publisher: | Elsevier BV |
| Place of publication: | Amsterdam |
| Type: | Article |
| Language: | English |
| Year of first Publication: | 2004 |
| Publishing Institution: | Universität Augsburg |
| Release Date: | 2025/07/22 |
| Volume: | 262 |
| Issue: | 1-4 |
| First Page: | 119 |
| Last Page: | 123 |
| DOI: | https://doi.org/10.1016/j.jcrysgro.2003.10.067 |
| Institutes: | Mathematisch-Naturwissenschaftlich-Technische Fakultät |
| Mathematisch-Naturwissenschaftlich-Technische Fakultät / Institut für Physik |
