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Investigation of plasma immersion ion implanted niobium oxide and titanium nitride films by nanohardness measurements

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Metadaten
Author:Axel KönigerGND, Wolfgang EnsingerORCiDGND, Claus HammerlGND, T. Höchbauer, G. Schrag, Josef Hartmann, R. W. Thomae, H. Bender, Bernd StritzkerGND, Bernd RauschenbachORCiD
Frontdoor URLhttps://opus.bibliothek.uni-augsburg.de/opus4/23809
Parent Title (English):Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Publisher:Elsevier
Place of publication:Amsterdam
Type:Article
Language:English
Year of first Publication:1996
Publishing Institution:Universität Augsburg
Release Date:2017/07/21
Volume:120
Issue:1-4
First Page:282
Last Page:285
DOI:https://doi.org/10.1016/S0168-583X(96)00527-7
Institutes:Mathematisch-Naturwissenschaftlich-Technische Fakultät
Mathematisch-Naturwissenschaftlich-Technische Fakultät / Institut für Physik
Mathematisch-Naturwissenschaftlich-Technische Fakultät / Institut für Physik / Lehrstuhl für Experimentalphysik IV