- Ion beam assisted electron cyclotron resonance plasma CVD (IB-PCVD) equipment was developed. Plasma was produced by a coaxial ECR discharge. A bucket-type ion source with a microwave plasma (MP) cathode was used as an ion source. Amorphous SiO2 films were deposited on austenitic-type stainless steel and silicon wafer substrates by use of the IB-PCVD equipment. The effects of the gas flow of monosilane, carbon dioxide and hydrogen and oxygen ion energies have been studied in the relation to composition, structure, corrosion properties and oxidation protection potential of the films. The surface morphology was observed by scanning electron microscopy. Auger spectroscopy, X-ray photoelectron spectroscopy and Fourier transform IR were used to characterize films and interface. The corrosion protection potential in an aqueous environment was evaluated by electrochemical techniques. Oxidation behaviour in the atmosphere in an oven was studied at 1000 °C. Surfaces of the films were smooth, andIon beam assisted electron cyclotron resonance plasma CVD (IB-PCVD) equipment was developed. Plasma was produced by a coaxial ECR discharge. A bucket-type ion source with a microwave plasma (MP) cathode was used as an ion source. Amorphous SiO2 films were deposited on austenitic-type stainless steel and silicon wafer substrates by use of the IB-PCVD equipment. The effects of the gas flow of monosilane, carbon dioxide and hydrogen and oxygen ion energies have been studied in the relation to composition, structure, corrosion properties and oxidation protection potential of the films. The surface morphology was observed by scanning electron microscopy. Auger spectroscopy, X-ray photoelectron spectroscopy and Fourier transform IR were used to characterize films and interface. The corrosion protection potential in an aqueous environment was evaluated by electrochemical techniques. Oxidation behaviour in the atmosphere in an oven was studied at 1000 °C. Surfaces of the films were smooth, and grain structure was not clear. These films had good corrosion protection. Oxidation of steel substrate was suppressed by the SiO2 coating. Oxygen irradiation during deposition was effective to improve corrosion and oxidation protection.…
