Influence of plasma density and plasma sheath dynamics on the ion implantation by plasma immersion technique
| Author: | H. Bender, J. Brutscher, Wolfgang EnsingerORCiDGND, R. Günzel, J. Halder, H. Klein, Bernd RauschenbachORCiD, J. Schäfer, B. Seiler, R. Thomae |
|---|---|
| Frontdoor URL | https://opus.bibliothek.uni-augsburg.de/opus4/23617 |
| ISSN: | 0168-583XOPAC |
| Parent Title (English): | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms |
| Publisher: | North-Holland |
| Place of publication: | Amsterdam |
| Type: | Article |
| Language: | English |
| Year of first Publication: | 1996 |
| Publishing Institution: | Universität Augsburg |
| Release Date: | 2017/07/21 |
| Volume: | 113 |
| Issue: | 1-4 |
| First Page: | 266 |
| Last Page: | 269 |
| DOI: | https://doi.org/10.1016/0168-583X(95)01414-4 |
| Institutes: | Mathematisch-Naturwissenschaftlich-Technische Fakultät |
| Mathematisch-Naturwissenschaftlich-Technische Fakultät / Institut für Physik |
