Lateral implantation homogeneity of wedge-shaped samples treated by plasma immersion ion implantation
| Author: | Wolfgang EnsingerORCiDGND, T. Höchbauer, Bernd RauschenbachORCiD |
|---|---|
| Frontdoor URL | https://opus.bibliothek.uni-augsburg.de/opus4/122985 |
| ISSN: | 0257-8972OPAC |
| Parent Title (English): | Surface and Coatings Technology |
| Publisher: | Elsevier BV |
| Place of publication: | Amsterdam |
| Type: | Article |
| Language: | English |
| Year of first Publication: | 1997 |
| Publishing Institution: | Universität Augsburg |
| Release Date: | 2025/07/17 |
| Volume: | 94-95 |
| First Page: | 352 |
| Last Page: | 355 |
| DOI: | https://doi.org/10.1016/s0257-8972(97)00354-x |
| Institutes: | Mathematisch-Naturwissenschaftlich-Technische Fakultät |
| Mathematisch-Naturwissenschaftlich-Technische Fakultät / Institut für Physik |
