Plasma immersion ion implantation for metallurgical and semiconductor research and development
| Author: | Wolfgang EnsingerORCiDGND |
|---|---|
| Frontdoor URL | https://opus.bibliothek.uni-augsburg.de/opus4/122702 |
| ISSN: | 0168-583XOPAC |
| Parent Title (English): | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms |
| Publisher: | Elsevier BV |
| Place of publication: | Amsterdam |
| Type: | Article |
| Language: | English |
| Year of first Publication: | 1996 |
| Publishing Institution: | Universität Augsburg |
| Release Date: | 2025/07/10 |
| Volume: | 120 |
| Issue: | 1-4 |
| First Page: | 270 |
| Last Page: | 281 |
| DOI: | https://doi.org/10.1016/s0168-583x(96)00526-5 |
| Institutes: | Mathematisch-Naturwissenschaftlich-Technische Fakultät |
| Mathematisch-Naturwissenschaftlich-Technische Fakultät / Institut für Physik |
