Regular surface patterns by local swelling induced by He implantation into silicon through nanosphere lithography masks
| Author: | Jörg K. N. Lindner, C. Seider, Frederic Fischer, Michael Weinl, Bernd StritzkerGND |
|---|---|
| Frontdoor URL | https://opus.bibliothek.uni-augsburg.de/opus4/123750 |
| ISSN: | 0168-583XOPAC |
| Parent Title (English): | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms |
| Publisher: | Elsevier BV |
| Place of publication: | Amsterdam |
| Type: | Article |
| Language: | English |
| Year of first Publication: | 2009 |
| Publishing Institution: | Universität Augsburg |
| Release Date: | 2025/07/22 |
| Volume: | 267 |
| Issue: | 8-9 |
| First Page: | 1394 |
| Last Page: | 1397 |
| DOI: | https://doi.org/10.1016/j.nimb.2009.01.052 |
| Institutes: | Mathematisch-Naturwissenschaftlich-Technische Fakultät |
| Mathematisch-Naturwissenschaftlich-Technische Fakultät / Institut für Physik | |
| Mathematisch-Naturwissenschaftlich-Technische Fakultät / Institut für Physik / Lehrstuhl für Experimentalphysik IV |
