Experimental and numerical optimization of beam shapes for short-pulse ultraviolet laser cutting processing
- In this work the effect of elliptical beam shapes on cutting performance of silicon is studied experimentally using a Diode Pumped Solid State Q-switched UV laser operating at the wavelength of 355 nm. Elliptical beams are investigated by varying scanning speed, repetition rate and average output power. It is shown that a short elliptical beam with 6×230 μm dimension forms a deeper groove at higher cutting speed and lower average output power compared to a longer elliptical beam. A numerical model of the laser cutting process is also described. Some validation results for single and multi-pulse cutting are shown.
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| Author: | Anatoly Sotnikov, Harald Laux, Bernd StritzkerGND |
|---|---|
| URN: | urn:nbn:de:bvb:384-opus4-1228729 |
| Frontdoor URL | https://opus.bibliothek.uni-augsburg.de/opus4/122872 |
| ISSN: | 1875-3892OPAC |
| Parent Title (English): | Physics Procedia |
| Publisher: | Elsevier BV |
| Place of publication: | Amsterdam |
| Type: | Article |
| Language: | English |
| Year of first Publication: | 2010 |
| Publishing Institution: | Universität Augsburg |
| Release Date: | 2025/07/10 |
| Volume: | 5 |
| Issue: | part A |
| First Page: | 137 |
| Last Page: | 146 |
| DOI: | https://doi.org/10.1016/j.phpro.2010.08.130 |
| Institutes: | Mathematisch-Naturwissenschaftlich-Technische Fakultät |
| Mathematisch-Naturwissenschaftlich-Technische Fakultät / Institut für Physik | |
| Mathematisch-Naturwissenschaftlich-Technische Fakultät / Institut für Physik / Lehrstuhl für Experimentalphysik IV | |
| Dewey Decimal Classification: | 5 Naturwissenschaften und Mathematik / 53 Physik / 530 Physik |
| Licence (German): |  CC-BY-NC-ND 3.0: Creative Commons - Namensnennung - Nicht kommerziell - Keine Bearbeitung (mit Print on Demand) |
