Radiation damage and amorphization of silicon by 2 MeV nitrogen ion implantation
| Author: | Jörg K. N. Lindner, R. Zuschlag, E. H. te Kaat |
|---|---|
| Frontdoor URL | https://opus.bibliothek.uni-augsburg.de/opus4/17857 |
| ISSN: | 0168-583xOPAC |
| Parent Title (English): | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms |
| Publisher: | Elsevier |
| Place of publication: | Amsterdam |
| Type: | Article |
| Language: | English |
| Year of first Publication: | 1992 |
| Release Date: | 2017/07/21 |
| Volume: | 62 |
| Issue: | 3 |
| First Page: | 314 |
| Last Page: | 318 |
| Note: | Auch erschienen in: Materials Science and Engineering B, 12(1992) S. 7-11 |
| DOI: | https://doi.org/10.1016/0168-583X(92)95248-P |
| Institutes: | Mathematisch-Naturwissenschaftlich-Technische Fakultät |
| Mathematisch-Naturwissenschaftlich-Technische Fakultät / Institut für Physik |
