EPR, XRD and optical reflectivity studies of radiation damage in silicon after high energy implantation of Ni ions
| Author: | V. S. Varichenko, A. M. Zaitsev, Jörg K. N. Lindner, R. Domres, N. M. Penina, D. P. Erchak, A. R. Chelyadinskii, V. A. Martinovitsh |
|---|---|
| Frontdoor URL | https://opus.bibliothek.uni-augsburg.de/opus4/20360 |
| ISSN: | 0168-583XOPAC |
| Parent Title (English): | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms |
| Publisher: | North-Holland |
| Place of publication: | Amsterdam |
| Type: | Article |
| Language: | English |
| Year of first Publication: | 1994 |
| Release Date: | 2017/07/21 |
| Volume: | 94 |
| Issue: | 3 |
| First Page: | 240 |
| Last Page: | 244 |
| DOI: | https://doi.org/10.1016/0168-583X(94)95361-9 |
| Institutes: | Mathematisch-Naturwissenschaftlich-Technische Fakultät |
| Mathematisch-Naturwissenschaftlich-Technische Fakultät / Institut für Physik |
