MeV metal ion implantations for buried layer fabrication in silicon
| Author: | Jörg K. N. Lindner |
|---|---|
| Frontdoor URL | https://opus.bibliothek.uni-augsburg.de/opus4/20361 |
| ISSN: | 0168-583XOPAC |
| Parent Title (English): | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms |
| Publisher: | North-Holland |
| Place of publication: | Amsterdam |
| Type: | Article |
| Language: | English |
| Year of first Publication: | 1994 |
| Release Date: | 2017/07/21 |
| Volume: | 84 |
| Issue: | 2 |
| First Page: | 153 |
| Last Page: | 162 |
| DOI: | https://doi.org/10.1016/0168-583X(94)95745-2 |
| Institutes: | Mathematisch-Naturwissenschaftlich-Technische Fakultät |
| Mathematisch-Naturwissenschaftlich-Technische Fakultät / Institut für Physik |
