Initial stages of epitaxial growth of Y-stabilized ZrO2 thin films on a- SiOx/Si(001) substrates
Author: | A. Bardal, Th. Matthée, J. Wecker, Konrad SamwerORCiDGND |
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Frontdoor URL | https://opus.bibliothek.uni-augsburg.de/opus4/20405 |
ISSN: | 1089-7550OPAC |
Parent Title (English): | Journal of Applied Physics |
Publisher: | American Institute of Physics |
Place of publication: | Melville, NY |
Type: | Article |
Language: | English |
Year of first Publication: | 1994 |
Release Date: | 2017/07/21 |
Volume: | 75 |
Issue: | 6 |
First Page: | 2902 |
Last Page: | 2910 |
DOI: | https://doi.org/10.1063/1.356183 |
Institutes: | Mathematisch-Naturwissenschaftlich-Technische Fakultät |
Mathematisch-Naturwissenschaftlich-Technische Fakultät / Institut für Physik |