Initial stages of epitaxial growth of Y-stabilized ZrO2 thin films on a- SiOx/Si(001) substrates

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Metadaten
Author:A. Bardal, Th. Matthée, J. Wecker, Konrad SamwerORCiDGND
Frontdoor URLhttps://opus.bibliothek.uni-augsburg.de/opus4/20405
ISSN:1089-7550OPAC
Parent Title (English):Journal of Applied Physics
Publisher:American Institute of Physics
Place of publication:Melville, NY
Type:Article
Language:English
Year of first Publication:1994
Release Date:2017/07/21
Volume:75
Issue:6
First Page:2902
Last Page:2910
DOI:https://doi.org/10.1063/1.356183
Institutes:Mathematisch-Naturwissenschaftlich-Technische Fakultät
Mathematisch-Naturwissenschaftlich-Technische Fakultät / Institut für Physik