Equipment for ion beam and UV-light assisted deposition
| Author: | M. Röckelein, Bernd RauschenbachORCiD |
|---|---|
| Frontdoor URL | https://opus.bibliothek.uni-augsburg.de/opus4/20506 |
| ISBN: | 978-3-88355-199-9OPAC |
| Parent Title (English): | Thin Films: proceedings of the joint 4th International Symposium on Trends and New Applications in Thin Films - TATF '94 and the 11th Conference on High Vacuum, Interfaces and Thin Films - HVITF '94; Dresden, March 7 - 11, 1994 |
| Publisher: | DGM-Informationsgesellschaft |
| Place of publication: | Oberursel |
| Editor: | G. Hecht, F. Richter, J. Hahn |
| Type: | Conference Proceeding |
| Language: | English |
| Year of first Publication: | 1994 |
| Release Date: | 2017/07/21 |
| First Page: | 220 |
| Last Page: | 223 |
| Institutes: | Mathematisch-Naturwissenschaftlich-Technische Fakultät |
| Mathematisch-Naturwissenschaftlich-Technische Fakultät / Institut für Physik |
