Ion beam assisted deposition induced composition changes in titanium nitride
| Author: | Jürgen W. GerlachGND, Hermann WengenmairGND, Josef Hartmann, W. Assmann, Bernd RauschenbachORCiD |
|---|---|
| Frontdoor URL | https://opus.bibliothek.uni-augsburg.de/opus4/23607 |
| ISSN: | 1862-6319OPAC |
| Parent Title (English): | physica status solidi (a) |
| Publisher: | Wiley-VCH |
| Place of publication: | Weinheim |
| Type: | Article |
| Language: | English |
| Year of first Publication: | 1996 |
| Release Date: | 2017/07/21 |
| Volume: | 155 |
| Issue: | 1 |
| First Page: | 181 |
| Last Page: | 188 |
| DOI: | https://doi.org/10.1002/pssa.2211550116 |
| Institutes: | Mathematisch-Naturwissenschaftlich-Technische Fakultät |
| Mathematisch-Naturwissenschaftlich-Technische Fakultät / Institut für Physik |
