Biaxial alignment of TiN films prepared by ion beam assisted deposition
| Author: | Jürgen W. GerlachGND, Uwe Preckwinkel, Hermann WengenmairGND, T. Kraus, Bernd RauschenbachORCiD |
|---|---|
| Frontdoor URL | https://opus.bibliothek.uni-augsburg.de/opus4/23611 |
| ISSN: | 1077-3118OPAC |
| Parent Title (English): | Applied Physics Letters |
| Publisher: | American Institute of Physics |
| Place of publication: | Melville, NY |
| Type: | Article |
| Language: | English |
| Year of first Publication: | 1996 |
| Release Date: | 2017/07/21 |
| Volume: | 68 |
| Issue: | 17 |
| First Page: | 2360 |
| Last Page: | 2362 |
| DOI: | https://doi.org/10.1063/1.115858 |
| Institutes: | Mathematisch-Naturwissenschaftlich-Technische Fakultät |
| Mathematisch-Naturwissenschaftlich-Technische Fakultät / Institut für Physik |
