Mechanical characterisation of titanium nitride films formed by low-energy ion beam assisted deposition
| Author: | Axel KönigerGND, Jürgen W. GerlachGND, Hermann WengenmairGND, C. Hammerl, Josef Hartmann, Bernd RauschenbachORCiD |
|---|---|
| Frontdoor URL | https://opus.bibliothek.uni-augsburg.de/opus4/23642 |
| ISSN: | 0257-8972OPAC |
| Parent Title (English): | Surface and Coatings Technology |
| Publisher: | Elsevier Science |
| Place of publication: | Amsterdam |
| Type: | Article |
| Language: | English |
| Year of first Publication: | 1996 |
| Release Date: | 2017/07/21 |
| Volume: | 84 |
| Issue: | 1-3 |
| First Page: | 439 |
| Last Page: | 442 |
| DOI: | https://doi.org/10.1016/S0257-8972(95)02750-5 |
| Institutes: | Mathematisch-Naturwissenschaftlich-Technische Fakultät |
| Mathematisch-Naturwissenschaftlich-Technische Fakultät / Institut für Physik |
