Synthesis of boron nitride films prepared by photon and ion assisted deposition
Author: | Bernd RauschenbachORCiD |
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Frontdoor URL | https://opus.bibliothek.uni-augsburg.de/opus4/23656 |
ISSN: | 0925-9635OPAC |
Parent Title (English): | Diamond and Related Materials |
Publisher: | Elsevier |
Place of publication: | Amsterdam |
Type: | Article |
Language: | English |
Year of first Publication: | 1996 |
Release Date: | 2017/07/21 |
Volume: | 5 |
Issue: | 9 |
First Page: | 883 |
Last Page: | 887 |
DOI: | https://doi.org/10.1016/0925-9635(95)00440-8 |
Institutes: | Mathematisch-Naturwissenschaftlich-Technische Fakultät |
Mathematisch-Naturwissenschaftlich-Technische Fakultät / Institut für Physik |