Influence of additional UV-light illumination on preparation of TiN by ion beam assisted deposition
| Author: | Hermann WengenmairGND, Jürgen W. GerlachGND, Michael Zeitler, T. Kraus, Bernd RauschenbachORCiD, H. Huber, W. Assmann |
|---|---|
| Frontdoor URL | https://opus.bibliothek.uni-augsburg.de/opus4/23812 |
| ISSN: | 0168-583XOPAC |
| Parent Title (English): | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms |
| Publisher: | North-Holland |
| Place of publication: | Amsterdam |
| Type: | Article |
| Language: | English |
| Year of first Publication: | 1996 |
| Release Date: | 2017/07/21 |
| Volume: | 120 |
| Issue: | 1-4 |
| First Page: | 286 |
| Last Page: | 289 |
| DOI: | https://doi.org/10.1016/S0168-583X(96)00528-9 |
| Institutes: | Mathematisch-Naturwissenschaftlich-Technische Fakultät |
| Mathematisch-Naturwissenschaftlich-Technische Fakultät / Institut für Physik |
