Characterization of carbon nitride produced by high-current vacuum arc deposition
| Author: | Josef Hartmann, P. Siemroth, B. Schultrich, Bernd RauschenbachORCiD |
|---|---|
| Frontdoor URL | https://opus.bibliothek.uni-augsburg.de/opus4/24504 |
| ISSN: | 0734-2101OPAC |
| Parent Title (English): | Journal of Vacuum Science and Technology (JVST) A: Vacuum, Surfaces, and Films |
| Publisher: | American Vacuum Society (AVS) |
| Type: | Article |
| Language: | English |
| Year of first Publication: | 1997 |
| Release Date: | 2017/07/21 |
| Volume: | 15 |
| Issue: | 6 |
| First Page: | 2983 |
| Last Page: | 2987 |
| DOI: | https://doi.org/10.1116/1.580893 |
| Institutes: | Mathematisch-Naturwissenschaftlich-Technische Fakultät |
| Mathematisch-Naturwissenschaftlich-Technische Fakultät / Institut für Physik |
