Characteristic features of an apparatus for plasma immersion ion implantation and physical vapour deposition
| Author: | Wolfgang EnsingerORCiDGND, J. Klein, P. Usedom, Bernd RauschenbachORCiD |
|---|---|
| Frontdoor URL | https://opus.bibliothek.uni-augsburg.de/opus4/24526 |
| ISSN: | 0257-8972OPAC |
| Parent Title (English): | Surface and Coatings Technology |
| Publisher: | Elsevier |
| Place of publication: | Amsterdam |
| Type: | Article |
| Language: | English |
| Year of first Publication: | 1997 |
| Release Date: | 2017/07/21 |
| Volume: | 93 |
| Issue: | 2-3 |
| First Page: | 175 |
| Last Page: | 180 |
| DOI: | https://doi.org/10.1016/S0257-8972(97)00040-6 |
| Institutes: | Mathematisch-Naturwissenschaftlich-Technische Fakultät |
| Mathematisch-Naturwissenschaftlich-Technische Fakultät / Institut für Physik |
