Evolution of texture at growth of titanium nitride films prepared by photon and ion beam assisted deposition
| Author: | Michael Zeitler, Jürgen W. GerlachGND, T. Kraus, Bernd RauschenbachORCiD |
|---|---|
| Frontdoor URL | https://opus.bibliothek.uni-augsburg.de/opus4/24533 |
| ISSN: | 1077-3118OPAC |
| Parent Title (English): | Applied Physics Letters |
| Publisher: | American Institute of Physics |
| Place of publication: | Melville, NY |
| Type: | Article |
| Language: | English |
| Year of first Publication: | 1997 |
| Release Date: | 2017/07/21 |
| Volume: | 70 |
| Issue: | 10 |
| First Page: | 1254 |
| Last Page: | 1256 |
| DOI: | https://doi.org/10.1063/1.118544 |
| Institutes: | Mathematisch-Naturwissenschaftlich-Technische Fakultät |
| Mathematisch-Naturwissenschaftlich-Technische Fakultät / Institut für Physik |
