Ion implantation into semiconductors, oxides and ceramics: proceedings of the E-MRS 1998 Spring Meeting Symposium J on Ion Implantation into Semiconductors, Oxides and Ceramics, Strasbourg, France, 16-19 June 1998
Frontdoor URL | https://opus.bibliothek.uni-augsburg.de/opus4/25121 |
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Publisher: | North-Holland |
Place of publication: | Amsterdam |
Editor: | Jörg K. N. Lindner |
Type: | Conference Proceeding |
Language: | English |
Year of first Publication: | 1999 |
Release Date: | 2017/07/21 |
Pagenumber: | XIV, 442 |
Series: | Beam Interactions with Materials and Atoms ; 147 |
Institutes: | Mathematisch-Naturwissenschaftlich-Technische Fakultät |
Mathematisch-Naturwissenschaftlich-Technische Fakultät / Institut für Physik |