Highly sensitive in-situ monitoring of mechanical stress during ion-beam-assisted deposition of thin titanium nitride films
| Author: | J. W. Gerlach, Thomas Kraus, S. Sienz, Michael Moske, Michael Zeitler, Bernd RauschenbachORCiD |
|---|---|
| Frontdoor URL | https://opus.bibliothek.uni-augsburg.de/opus4/25894 |
| ISSN: | 0257-8972OPAC |
| Parent Title (English): | Surface and Coatings Technology |
| Publisher: | Elsevier |
| Place of publication: | Amsterdam |
| Type: | Article |
| Language: | English |
| Year of first Publication: | 1998 |
| Release Date: | 2017/07/21 |
| Volume: | 103–104 |
| First Page: | 281 |
| Last Page: | 286 |
| DOI: | https://doi.org/10.1016/S0257-8972(98)00424-1 |
| Institutes: | Mathematisch-Naturwissenschaftlich-Technische Fakultät |
| Mathematisch-Naturwissenschaftlich-Technische Fakultät / Institut für Physik |
