In situ stress analysis of boron nitride films prepared by ion beam assisted deposition
Author: | Michael Zeitler, S. Sienz, H. Neumann, M. Zeuner, Jürgen W. GerlachGND, Bernd RauschenbachORCiD |
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Frontdoor URL | https://opus.bibliothek.uni-augsburg.de/opus4/25916 |
ISSN: | 0168-583xOPAC |
Parent Title (English): | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms |
Publisher: | Elsevier |
Place of publication: | Amsterdam |
Type: | Article |
Language: | English |
Year of first Publication: | 1998 |
Release Date: | 2017/07/21 |
Volume: | 139 |
Issue: | 1-4 |
First Page: | 327 |
Last Page: | 331 |
DOI: | https://doi.org/10.1016/S0168-583X(98)00045-7 |
Institutes: | Mathematisch-Naturwissenschaftlich-Technische Fakultät |
Mathematisch-Naturwissenschaftlich-Technische Fakultät / Institut für Physik |