Treatment uniformity of plasma immersion ion implantation studied with three-dimensional model systems
| Author: | Wolfgang EnsingerORCiDGND, T. Höchbauer, Bernd RauschenbachORCiD |
|---|---|
| Frontdoor URL | https://opus.bibliothek.uni-augsburg.de/opus4/25933 |
| ISSN: | 0257-8972OPAC |
| Parent Title (English): | Surface and Coatings Technology |
| Publisher: | Elsevier |
| Place of publication: | Amsterdam |
| Type: | Article |
| Language: | English |
| Year of first Publication: | 1998 |
| Release Date: | 2017/07/21 |
| Volume: | 103-104 |
| First Page: | 218 |
| Last Page: | 221 |
| DOI: | https://doi.org/10.1016/S0257-8972(98)00396-X |
| Institutes: | Mathematisch-Naturwissenschaftlich-Technische Fakultät |
| Mathematisch-Naturwissenschaftlich-Technische Fakultät / Institut für Physik |
