Numerical modelling of the plasma source ion implantation process in 2D
| Author: | L. Stals, M. Paulus, Bernd RauschenbachORCiD, U. Rüde |
|---|---|
| Frontdoor URL | https://opus.bibliothek.uni-augsburg.de/opus4/25944 |
| ISBN: | 978-981-4544-73-3OPAC |
| Parent Title (English): | Computational Techniques and Applications: CTAC97: proceedings of the Eighth Biennial Conference |
| Publisher: | World Scientific |
| Place of publication: | Singapore |
| Editor: | John Noye, Michael Teubner, Andrew Gill |
| Type: | Conference Proceeding |
| Language: | English |
| Year of first Publication: | 1998 |
| Release Date: | 2017/07/21 |
| First Page: | 663 |
| Last Page: | 670 |
| DOI: | https://doi.org/10.1142/9789814528412 |
| Institutes: | Mathematisch-Naturwissenschaftlich-Technische Fakultät |
| Mathematisch-Naturwissenschaftlich-Technische Fakultät / Institut für Physik |
