High-dose carbon implantations into silicon: fundamental studies for new technological tricks
| Author: | Jörg K. N. Lindner |
|---|---|
| Frontdoor URL | https://opus.bibliothek.uni-augsburg.de/opus4/31901 |
| ISSN: | 1432-0630OPAC |
| Parent Title (English): | Applied Physics A |
| Publisher: | Springer |
| Place of publication: | Berlin |
| Type: | Article |
| Language: | English |
| Year of first Publication: | 2003 |
| Release Date: | 2017/07/21 |
| Volume: | 77 |
| Issue: | 1 |
| First Page: | 27 |
| Last Page: | 38 |
| DOI: | https://doi.org/10.1007/s00339-002-2062-8 |
| Institutes: | Mathematisch-Naturwissenschaftlich-Technische Fakultät |
| Mathematisch-Naturwissenschaftlich-Technische Fakultät / Institut für Physik |
