Formation of SiC thin films by ion beam synthesis
| Author: | Jörg K. N. Lindner |
|---|---|
| Frontdoor URL | https://opus.bibliothek.uni-augsburg.de/opus4/31903 |
| ISBN: | 978-3-642-62333-2OPAC |
| Parent Title (English): | Silicon carbide: recent major advances |
| Publisher: | Springer |
| Place of publication: | Berlin |
| Editor: | W. J. Choyke, H. Matsunami, G. Pensl |
| Type: | Part of a Book |
| Language: | English |
| Year of first Publication: | 2004 |
| Release Date: | 2017/07/21 |
| First Page: | 251 |
| Last Page: | 277 |
| Series: | Advanced Texts in Physics |
| DOI: | https://doi.org/10.1007/978-3-642-18870-1_11 |
| Institutes: | Mathematisch-Naturwissenschaftlich-Technische Fakultät |
| Mathematisch-Naturwissenschaftlich-Technische Fakultät / Institut für Physik |
