Local composition analysis of SiC microstructures formed by ion projection in silicon using energy filtered TEM in combination with FIB specimen preparation
| Author: | Jörg K. N. Lindner, S. Kubsky, A. Schertel |
|---|---|
| Frontdoor URL | https://opus.bibliothek.uni-augsburg.de/opus4/31905 |
| ISSN: | 1873-4944OPAC |
| Parent Title (English): | Materials Science and Engineering: B |
| Publisher: | Elsevier |
| Place of publication: | Amsterdam |
| Type: | Article |
| Language: | English |
| Year of first Publication: | 2003 |
| Release Date: | 2017/07/21 |
| Volume: | 102 |
| Issue: | 1-3 |
| First Page: | 70 |
| Last Page: | 74 |
| DOI: | https://doi.org/10.1016/S0921-5107(02)00631-1 |
| Institutes: | Mathematisch-Naturwissenschaftlich-Technische Fakultät |
| Mathematisch-Naturwissenschaftlich-Technische Fakultät / Institut für Physik |
