Lattice damage of relaxed Si1-xGex alloys of various composition implanted with 2 MeV Si ions

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Metadaten
Author:Jörg K. N. Lindner
Frontdoor URLhttps://opus.bibliothek.uni-augsburg.de/opus4/33555
ISSN:1662-9752OPAC
Parent Title (English):Materials Science Forum
Publisher:Trans Tech Publications
Place of publication:Baech
Type:Article
Language:English
Year of first Publication:1997
Release Date:2017/07/21
Volume:248-249
First Page:241
Last Page:244
DOI:https://doi.org/10.4028/www.scientific.net/MSF.248-249.241
Institutes:Mathematisch-Naturwissenschaftlich-Technische Fakultät
Mathematisch-Naturwissenschaftlich-Technische Fakultät / Institut für Physik