MeV ion implantation induced damage in relaxed Si1-xGex

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Author:A. Nylandsted Larsen, C. O’Raifeartaigh, R. C. Barklie, B. Holm, F. Priolo, G. Franzo, G. Lulli, M. Bianconi, R. Nipoti, Jörg K. N. Lindner, A. Mesli, J. J. Grob, F. Cristiano, P. L. F. Hemment
Frontdoor URLhttps://opus.bibliothek.uni-augsburg.de/opus4/33560
ISSN:1089-7550OPAC
Parent Title (English):Journal of Applied Physics
Publisher:American Institute of Physics
Place of publication:Melville, NY
Type:Article
Language:English
Year of first Publication:1997
Release Date:2017/07/21
Volume:81
Issue:5
First Page:2208
Last Page:2218
DOI:https://doi.org/10.1063/1.364288
Institutes:Mathematisch-Naturwissenschaftlich-Technische Fakultät
Mathematisch-Naturwissenschaftlich-Technische Fakultät / Institut für Physik