The role of particle energy and pulsed particle flux in physical vapor deposition and pulsed–laser deposition
| Author: | Stefan MayrGND, Michael Moske, Konrad SamwerORCiDGND, Maggie E. Taylor, Harry A. Atwater |
|---|---|
| Frontdoor URL | https://opus.bibliothek.uni-augsburg.de/opus4/39247 |
| ISSN: | 0003-6951OPAC |
| ISSN: | 1077-3118OPAC |
| Parent Title (English): | Applied Physics Letters |
| Publisher: | AIP Publishing |
| Type: | Article |
| Language: | English |
| Year of first Publication: | 1999 |
| Release Date: | 2018/07/30 |
| Volume: | 75 |
| Issue: | 26 |
| First Page: | 4091 |
| Last Page: | 4093 |
| DOI: | https://doi.org/10.1063/1.125546 |
| Institutes: | Mathematisch-Naturwissenschaftlich-Technische Fakultät |
| Mathematisch-Naturwissenschaftlich-Technische Fakultät / Institut für Physik |
