Recovery of the Si–SiO2 interface studied by self-diffusion after high fluence ion implantation of 28Si
| Author: | Helmut KarlORCiDGND, Ch. Delpero, P. Huber, Bernd StritzkerGND |
|---|---|
| Frontdoor URL | https://opus.bibliothek.uni-augsburg.de/opus4/78610 |
| ISSN: | 0168-583XOPAC |
| Parent Title (English): | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms |
| Publisher: | Elsevier |
| Place of publication: | Amsterdam [u.a.] |
| Type: | Article |
| Language: | English |
| Year of first Publication: | 2006 |
| Publishing Institution: | Universität Augsburg |
| Release Date: | 2020/08/04 |
| Tag: | Instrumentation; Nuclear and High Energy Physics |
| Volume: | 242 |
| Issue: | 1-2 |
| First Page: | 683 |
| Last Page: | 685 |
| DOI: | https://doi.org/10.1016/j.nimb.2005.08.088 |
| Institutes: | Mathematisch-Naturwissenschaftlich-Technische Fakultät |
| Mathematisch-Naturwissenschaftlich-Technische Fakultät / Institut für Physik | |
| Mathematisch-Naturwissenschaftlich-Technische Fakultät / Institut für Physik / Lehrstuhl für Experimentalphysik IV |
